Carbon tetrafluoride is the most used electronic gas in the microelectronics industry, and it is a very strong greenhouse gas. Direct emissions will cause enormous damage to the global environment.

The main process of using activated carbon to treat carbon tetrafluoride is first to use activated carbon and adsorption and desorption equipment to capture and adsorb carbon tetrafluoride. After the adsorption saturation is completed, desorb and recover carbon tetrafluoride. The recovered carbon tetrafluoride It can be reused after purification. Activated carbon fails after 1-2 years of use, and can react with fluorine gas in the reaction furnace to generate carbon tetrafluoride, and the adsorbed carbon tetrafluoride is also released and recovered in the production process to achieve the recycling of carbon tetrafluoride.

The main feature of carbon tetrafluoride-specific activated carbon is that it can not only efficiently adsorb electronic gases, especially carbon tetrafluoride, but also meet the requirements of using activated carbon to prepare carbon tetrafluoride after adsorption saturation, which requires activated carbon to have high adsorption capacity Value and lower acid-soluble substances, but also have a suitable specific surface area and pore distribution, in order to improve the reaction efficiency during the preparation process. Our company uses coal with high fixed carbon content to further reduce ash and alkali metal substances through the process, and then control the specific surface area porosity through activation, so that the activated carbon can meet the requirements of adsorption and desorption, and also meet the needs of preparing carbon tetrafluoride. . The activated carbon greatly improves the purity of the crude product in the carbon tetrafluoride production process, and greatly reduces the burden and extra consumption for the next step of rectification treatment.